Fluence-dependent transmission in CaF2 including correlation with thermally stimulated current

Glenn E. Kohnke; Chong An; Charlene M. Smith; Paula J. Holmes

doi:10.1117/12.535651

28 May 2004 Fluence-dependent transmission in CaF₂ including correlation with thermally stimulated current

Glenn E. Kohnke, Chong An, Charlene M. Smith, Paula J. Holmes

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.535651
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Calcium fluoride exhibits a fluence dependent transmission behavior at the 193 nm excimer laser wavelength of interest for photolithography applications. The transmission as a function of fluence is determined using a 193 nm excimer laser based transmission measurement system. Different transmission decay rate and saturation level is observed and correlated with structural defects and impurities. Thermally stimulated current measurements are applied to identify defects and correlate the relative concentration of mobile anion vacancies with fluence dependent transmission.

Citation Download Citation

Glenn E. Kohnke, Chong An, Charlene M. Smith, and Paula J. Holmes "Fluence-dependent transmission in CaF₂ including correlation with thermally stimulated current", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.535651

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