High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy

Michael P. Kowalski; Raymond G. Cruddace; Troy W. Barbee Jr.; William R. Hunter; Klaus F. Heidemann; Bruno Nelles; Ralf Lenke; Holger Kierey

doi:10.1117/12.551304

11 October 2004 High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy

Michael P. Kowalski, Raymond G. Cruddace, Troy W. Barbee Jr., William R. Hunter, Klaus F. Heidemann, Bruno Nelles, Ralf Lenke, Holger Kierey

Author Affiliations +

Proceedings Volume 5488, UV and Gamma-Ray Space Telescope Systems; (2004) https://doi.org/10.1117/12.551304
Event: SPIE Astronomical Telescopes + Instrumentation, 2004, Glasgow, United Kingdom

Abstract

We have measured the topography and near-normal incidence EUV efficiency of five flat multilayer-coated polymer-overcoated blazed ion-etched holographic test gratings. Blaze angles were in the range 2.0-4.1°. All gratings had a surface roughness <3 Å rms (20-4000 Å). The best grating had a measured efficiency of 29.9% in the second order at 157.9 Å and a derived groove efficiency of 53.0%. At the shortest wavelength investigated (100.0 Å) another grating produced a measured efficiency in the first order of 12.9% and a derived groove efficiency of 33.6%. In third order another grating produced a measured efficiency at 137.8 Å of 13.4% and a derived groove efficiency of 21.8%. To the best of our knowledge these values exceed previous published results. Some issues remain that may be associated with modification of the groove profile by the multilayer coating.

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Michael P. Kowalski, Raymond G. Cruddace, Troy W. Barbee Jr., William R. Hunter, Klaus F. Heidemann, Bruno Nelles, Ralf Lenke, and Holger Kierey "High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy", Proc. SPIE 5488, UV and Gamma-Ray Space Telescope Systems, (11 October 2004); https://doi.org/10.1117/12.551304

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