Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe

Takuo Kanayama; Noriyoshi Omote; Satoshi Kajimoto; Keiji Hayashi

doi:10.1117/12.596391

8 October 2004 Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe

Takuo Kanayama, Noriyoshi Omote, Satoshi Kajimoto, Keiji Hayashi

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Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596391
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

An insight into surface chemical reactions responsible for organometallic vapor phase epitaxial growth of ZnSe under alternate supply of diethylzinc and dimethylselenium was provided by findings in laser-assisted free-radical doping experiments. Based on ab initio molecular orbital analyses, atmosphere-sensitive characteristics of the ZnSe growth were attributed to differences in the pathways and the corresponding adiabatic potential barriers between diethylzinc chemisorption onto hydrogen- and methyl-terminated Se-stabilized ZnSe surfaces.

Citation Download Citation

Takuo Kanayama, Noriyoshi Omote, Satoshi Kajimoto, and Keiji Hayashi "Surface reactions responsible for atmosphere-sensitive characteristics of alternate-supply OMVPE growth of ZnSe", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596391

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