Tunable properties of PbxSr1-xTiO3 thin films

Boyu Ni; Dongwen Peng; Wenbiao Wu; Zhongyan Meng

doi:10.1117/12.607283

8 December 2004 Tunable properties of Pb_xSr_1-xTiO₃ thin films

Boyu Ni, Dongwen Peng, Wenbiao Wu, Zhongyan Meng

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.607283
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

Lead strontium titanate (PbxSr_1-xTiO₃) thin films with Pb/Sr ration of 10/90, 20/80, 30/70 and 40/60 were deposited on Pt/Ti/SiO₂/Si substrates by sol-gel techniques. Both structural and dielectric properties of PST films as a function of Pb/Sr ratios were investigated. PST thin films showed typical polycrystalline structure without preferential orientation. The measured capacitance and tunability systematically increased with the increase in Pb content. Among all the PST thin films, PST (30/70) thin film has the best crystallization and dielectric properties. The dielectric constant, dielectric loss tenability and FOM of the PST (30/&70) film are 376,0.022, 61.0% and 28, respectively.

Citation Download Citation

Boyu Ni, Dongwen Peng, Wenbiao Wu, and Zhongyan Meng "Tunable properties of Pb_xSr_1-xTiO₃ thin films", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.607283

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