Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses

Takeshi Higashiguchi; Chirag Rajyaguru; Masato Koga; Keita Kawasaki; Wataru Sasaki; Shoichi Kubodera; Takashi Kikuchi; Noboru Yugami; Shigeo Kawata; Alexander A. Andreev

doi:10.1117/12.611202

23 March 2005 Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses

Takeshi Higashiguchi, Chirag Rajyaguru, Masato Koga, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera, Takashi Kikuchi, Noboru Yugami, Shigeo Kawata, Alexander A. Andreev

Author Affiliations +

Proceedings Volume 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers; (2005) https://doi.org/10.1117/12.611202
Event: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 2004, Prague, Czech Republic

Abstract

Extreme ultraviolet (EUV) radiation at the wavelength of around 13nm waws observed from a laser-produced plasma using continuous water-jet. Strong dependence of the conversion efficiency (CE) on the laser focal spot size and jet diameter was observed. The EUV CE at a given laser spot size and jet diameter was further enhanced using double laser pulses, where a pre-pulse was used for initial heating of the plasma.

Citation Download Citation

Takeshi Higashiguchi, Chirag Rajyaguru, Masato Koga, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera, Takashi Kikuchi, Noboru Yugami, Shigeo Kawata, and Alexander A. Andreev "Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses", Proc. SPIE 5777, XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, (23 March 2005); https://doi.org/10.1117/12.611202

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