Base technology process for linear CCD

Evgeny V. Kostykov; Alexander A. Skrylev

doi:10.1117/12.637785

6 December 2006 Base technology process for linear CCD

Evgeny V. Kostykov, Alexander A. Skrylev

Proceedings Volume 5944, Smart Imagers and Their Application; 594407 (2006) https://doi.org/10.1117/12.637785
Event: Smart Imagers and Their Application, 2004, Moscow, Russian Federation

Abstract

The base manufacturing techniques of solid-state silicon photodetectors of the visible range - photosensitive devices with charging communication are described by the example of linear CCD. Characteristics of linear photodetectors are resulted.

Citation Download Citation

Evgeny V. Kostykov and Alexander A. Skrylev "Base technology process for linear CCD", Proc. SPIE 5944, Smart Imagers and Their Application, 594407 (6 December 2006); https://doi.org/10.1117/12.637785

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