Laser ablated coupling structures for optical printed circuit boards

Geert Van Steenberge; Peter Geerinck; Markus Riester; Siegfried Pongratz; Peter Van Daele

doi:10.1117/12.622890

30 September 2005 Laser ablated coupling structures for optical printed circuit boards

Geert Van Steenberge, Peter Geerinck, Markus Riester, Siegfried Pongratz, Peter Van Daele

Proceedings Volume 5956, Integrated Optics: Theory and Applications; 59561A (2005) https://doi.org/10.1117/12.622890
Event: Congress on Optics and Optoelectronics, 2005, Warsaw, Poland

Abstract

We report on the cost effective fabrication of 45° micromirror couplers within single-mode polymer waveguides for achieving fully embedded board-level optoelectronic interconnections. Compatibility with existing board manufacturing technology is achieved by making use of polymers with high thermal stability. The sol-gel polymers behave as negative photo resist and waveguides are patterned by UV exposure. Micromirrors are fabricated using excimer laser ablation, a very flexible technology that is particularly well suited for structuring of polymers because of their excellent UV-absorption properties and highly non-thermal ablation behavior. A coupling structure based on total internal reflection (TIR) is enhanced by developing a process for embedding a metal coated 45° mirror in the optical layers. The mirrors are selectively metallized using a lift-off process. Filling up the angled via without the presence of air bubbles and providing a flat surface above the mirror is only possible by enhancing the cladding deposition process with ultrasound agitation. Surface roughness of both the mirrors and the upper cladding surface above the mirrors is investigated using a non-contact optical profiler. Initial loss measurements at 1.3 μm show a propagation loss of 0.62 dB/cm and an excess mirror loss of 1.55 dB. During most recent experiments mirror roughness has been reduced from 160 nm to 20 nm, which will seriously reduce the mirror loss.

Citation Download Citation

Geert Van Steenberge, Peter Geerinck, Markus Riester, Siegfried Pongratz, and Peter Van Daele "Laser ablated coupling structures for optical printed circuit boards", Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59561A (30 September 2005); https://doi.org/10.1117/12.622890

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available