Multilayer Fabry-Perot microbolometers for infrared wavelength selective detection

Sangwook Han; Joo-Yun Jung; Dean P. Neikirk

doi:10.1117/12.666156

17 May 2006 Multilayer Fabry-Perot microbolometers for infrared wavelength selective detection

Sangwook Han, Joo-Yun Jung, Dean P. Neikirk

Proceedings Volume 6206, Infrared Technology and Applications XXXII; 62061G (2006) https://doi.org/10.1117/12.666156
Event: Defense and Security Symposium, 2006, Orlando (Kissimmee), Florida, United States

Abstract

Multi-color narrow-band Salisbury Screen and Jaumann Absorbers using optimized thickness Si₃N₄ layers are designed that produce wavelength selectivity in 7~14μm wavelength band. The Jaumann Absorbers can be used as a vertically stacked pixel structure to save space and enhance resolution compared to frequency selective Salisbury Screens pixels lying in a common plane.

Citation Download Citation

Sangwook Han, Joo-Yun Jung, and Dean P. Neikirk "Multilayer Fabry-Perot microbolometers for infrared wavelength selective detection", Proc. SPIE 6206, Infrared Technology and Applications XXXII, 62061G (17 May 2006); https://doi.org/10.1117/12.666156

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