Boron distribution profiling in asymmetrical n+-p silicon photodiodes and new creation concept of selectively sensitive photoelements for megapixel color photoreceivers

V. A. Gergel; A. V. Lependin; Yu. I. Tishin; I. V. Vanyushin; V. A. Zimoglyad

doi:10.1117/12.677027

10 June 2006 Boron distribution profiling in asymmetrical n⁺-p silicon photodiodes and new creation concept of selectively sensitive photoelements for megapixel color photoreceivers

V. A. Gergel, A. V. Lependin, Yu. I. Tishin, I. V. Vanyushin, V. A. Zimoglyad

Author Affiliations +

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 62600C (2006) https://doi.org/10.1117/12.677027
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

Experimental results on spectral photo responsivity obtained for silicon n⁺-p photodiodes with implanted p⁺ layer in a silicon substrate are represented. It is demonstrated, that such p⁺ doping effectively shifts long-wave edge of the photodiode's spectral sensitivity in optical range of light spectrum, depending on the p⁺ layer bedding depth. A new concept of selectively sensitive photoelements development was stated for megapixel color photoreceivers on the basis of n⁺-p photodiode structures, containing one or more different (in depths) implanted layers, which form color separation potential barriers and lateral diffusion channels required for collecting of minority carriers generated by quanta of different wavelength.

Citation Download Citation

V. A. Gergel, A. V. Lependin, Yu. I. Tishin, I. V. Vanyushin, and V. A. Zimoglyad "Boron distribution profiling in asymmetrical n⁺-p silicon photodiodes and new creation concept of selectively sensitive photoelements for megapixel color photoreceivers", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 62600C (10 June 2006); https://doi.org/10.1117/12.677027

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available