Fiber micro-vibration readout sensor based on MOEMS

Rui Li; Wen Xiao; Dewen Liu; Yu Cui

doi:10.1117/12.725507

29 January 2007 Fiber micro-vibration readout sensor based on MOEMS

Rui Li, Wen Xiao, Dewen Liu, Yu Cui

Proceedings Volume 6279, 27th International Congress on High-Speed Photography and Photonics; 627964 (2007) https://doi.org/10.1117/12.725507
Event: 27th International congress on High-Speed Photography and Photonics, 2006, Xi'an, China

Abstract

To measure the vibration of micro-structure, a scheme of sensor based on MOEMS (Micro-Optic-Electro-Mechanical System) with fiber-optic readout was proposed, and its mathematical model was deduced. Single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of single-fiber structure and parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system because of single-fiber structure and parameters optimization of micro-structure. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm.

Citation Download Citation

Rui Li, Wen Xiao, Dewen Liu, and Yu Cui "Fiber micro-vibration readout sensor based on MOEMS", Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 627964 (29 January 2007); https://doi.org/10.1117/12.725507

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KEYWORDS

Fiber optics sensors

Sensors

Structured optical fibers

Microopto electromechanical systems

Reflectivity

Ceramics

Ferroelectric materials

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