Simulation and realization of RCE photodiode with transparent and unique pattern ohmic contact microstructure

Yiqun Li D.D.S.; Yongqing Huang; Ang Miao; Jihe Lv; Hui Huang; Xiaomin Ren

doi:10.1117/12.687941

6 October 2006 Simulation and realization of RCE photodiode with transparent and unique pattern ohmic contact microstructure

Yiqun Li D.D.S., Yongqing Huang, Ang Miao, Jihe Lv, Hui Huang, Xiaomin Ren

Author Affiliations +

Proceedings Volume 6352, Optoelectronic Materials and Devices; 635232 (2006) https://doi.org/10.1117/12.687941
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea

Abstract

In order to resolve the trade-off between quantum efficiency and response speed in resonant cavity enhanced (RCE) photodiode, the scheme of the transparent and unique pattern ohmic contact (TUPOC) microstructure was proposed. This scheme can be used for improving device's response speed by reducing the diode capacitance without influencing quantum efficiency. Three kinds of the TUPOC microstructures were proposed and simulated, the first one was realized. The response speed of the finished device with mesa area of 50×50μm² is remarkably increased, 3dB bandwidth of 18GHz has been demonstrated, but the device without the TUPOC microstructure only have 3dB bandwidth of 9.47GHz.

Citation Download Citation

Yiqun Li D.D.S., Yongqing Huang, Ang Miao, Jihe Lv, Hui Huang, and Xiaomin Ren "Simulation and realization of RCE photodiode with transparent and unique pattern ohmic contact microstructure", Proc. SPIE 6352, Optoelectronic Materials and Devices, 635232 (6 October 2006); https://doi.org/10.1117/12.687941

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