A two-dimensional displacement sensor and its application in profile measurement

Xudong Yang; Yurong Chen; Tiebang Xie

doi:10.1117/12.717823

30 October 2006 A two-dimensional displacement sensor and its application in profile measurement

Xudong Yang, Yurong Chen, Tiebang Xie

Proceedings Volume 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation; 635816 (2006) https://doi.org/10.1117/12.717823
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

The synthetic measurement of complex profile with high precision and large range is a difficulty among surface topography measuring techniques because the measuring range and the precision of traditional profilometers is limited. Moreover, the stylus of traditional profilometers cannot skim over the steep wall successfully. This paper presents a twodimension displacement sensor. Accompanied by the vertical scanning platform, the two-dimension displacement sensor can measure the complex profile with high precision and large range. The sensor is composed of two inductance displacement sensors. The vertical displacement sensor detects the vertical displacement and the horizontal displacement sensor detects the horizontal displacement. When the workpiece is measured, the vertical undulation of profile lead to the zero offset of the vertical displacement sensor. According to the zero offset, the piezoelectric actuator and the servo motor drive the vertical scanning platform to move vertically to ensure that the lever is always in balance position. When the stylus barges up against the steep wall, the horizontal resistance force results in the other zero offset of the horizontal displacement sensor. If the horizontal resistance force is too strong, the vertical scanning platform descends to make the stylus climb the steep wall successfully.

Citation Download Citation

Xudong Yang, Yurong Chen, and Tiebang Xie "A two-dimensional displacement sensor and its application in profile measurement", Proc. SPIE 6358, Sixth International Symposium on Instrumentation and Control Technology: Sensors, Automatic Measurement, Control, and Computer Simulation, 635816 (30 October 2006); https://doi.org/10.1117/12.717823

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KEYWORDS

Sensors

Inductance

Diffraction gratings

Actuators

Signal processing

Resistance

Servomechanisms

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