Reflectance difference spectrometer based on the use of a CCD camera

L. F. Lastras-Martínez; R. Castro-García; R. E. Balderas-Navarro; A. Lastras-Martínez

doi:10.1117/12.742346

16 May 2007 Reflectance difference spectrometer based on the use of a CCD camera

L. F. Lastras-Martínez, R. Castro-García, R. E. Balderas-Navarro, A. Lastras-Martínez

Proceedings Volume 6422, Sixth Symposium Optics in Industry; 64221C (2007) https://doi.org/10.1117/12.742346
Event: Sixth Symposium Optics in Industry, 2007, Monterrey, Mexico

Abstract

Reflectance Difference Spectroscopy (RDS) is a powerful tool for the optical characterization of cubic semiconductors. Several physical mechanisms have been identified to contribute to the RDS signal. Among these we can count on surface electric fields, lineal defects, and surface strains. The RDS setups reported so far, use photodiodes and photomultipliers as light detectors and lock-in techniques to process the signal. In the present work we describe a new instrument based on a charged-coupled device (CCD) as light detector. By focusing the light on the CCD, it is possible to obtain the RD spectra coming from different regions of the semiconductor surface, by analyzing the spectra for a group of pixels of the CCD. The instrument can be used to obtain a topographic map of the surface of the semiconductor.

Citation Download Citation

L. F. Lastras-Martínez, R. Castro-García, R. E. Balderas-Navarro, and A. Lastras-Martínez "Reflectance difference spectrometer based on the use of a CCD camera", Proc. SPIE 6422, Sixth Symposium Optics in Industry, 64221C (16 May 2007); https://doi.org/10.1117/12.742346

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