Nanocrystalline Sr1-xBaxBi4Ti4O15 thin films for piezoelectric pressure sensor

Nor Azlian Abdul Manaf; Muhamad Mat Salleh; Muhammad Yahaya

doi:10.1117/12.779213

1 November 2007 Nanocrystalline Sr_1-xBa_xBi₄Ti4O₁₅ thin films for piezoelectric pressure sensor

Nor Azlian Abdul Manaf, Muhamad Mat Salleh, Muhammad Yahaya

Proceedings Volume 6423, International Conference on Smart Materials and Nanotechnology in Engineering; 64230A (2007) https://doi.org/10.1117/12.779213
Event: International Conference on Smart Materials and Nanotechnology in Engineering, 2007, Harbin, China

Abstract

This paper reports the fabrication of nanocrystalline Strontium Barium Bismuth Titanate Sr_1-xBa_xBi₄Ti₄O₁₅ (SBBT) thin films for piezoelectric pressure sensors. The SBBT films and capacitance devices with structure of Al/TiO₂/SBBT/TiO₂/RuO₂/SiO₂/Si were fabricated using sol-gel technique. Different nanostructures of the films were prepared with un-annealed condition as well as after annealing at three temperatures; 400, 500 and 600^oC, in air for 2 minutes. The nanostructure of SBBT thin films have been systematically studied by XRD, AFM, SEM and dielectric constant. For the sensor device measurement, the SBBT thin film pressure sensors were tested by pneumatic loading method at pressure range between 0 to 450 kPa. It was found that the sensing properties of the films were affected by the nanostructure of the films. It was shown that there was a linear relationship between the crystallization, grains size and dielectric properties with the sensing response of the film towards pressure. The film with higher crystallization, grains size and dielectric properties demonstrates better sensitivity and repeatability compared to others. The correlation between nanostructure of the SBBT films and the piezoelectric pressure sensing properties will be discussed.

Citation Download Citation

Nor Azlian Abdul Manaf, Muhamad Mat Salleh, and Muhammad Yahaya "Nanocrystalline Sr_1-xBa_xBi₄Ti4O₁₅ thin films for piezoelectric pressure sensor", Proc. SPIE 6423, International Conference on Smart Materials and Nanotechnology in Engineering, 64230A (1 November 2007); https://doi.org/10.1117/12.779213

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available