A metal-to-metal contact RF MEMS switch towards handsets applications

Tauno Vähä-Heikkilä; Pekka Rantakari

doi:10.1117/12.721582

15 May 2007 A metal-to-metal contact RF MEMS switch towards handsets applications

Tauno Vähä-Heikkilä, Pekka Rantakari

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 65890Y (2007) https://doi.org/10.1117/12.721582
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

A MEMS switch for radio frequency applications has been designed, fabricated, and characterized. The focus has been in the optimization of switch performance towards handset applications. The realized switch has actuation voltage less than 15 V for realizing a good metal-to-metal contact. Measured results show loss less than 0.25 dB up to 10 GHz with matching better than -30 dB in the down-state, and isolation better than -20 dB up to 6 GHz in the up-state.

Citation Download Citation

Tauno Vähä-Heikkilä and Pekka Rantakari "A metal-to-metal contact RF MEMS switch towards handsets applications", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890Y (15 May 2007); https://doi.org/10.1117/12.721582

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available