Design and process of low loss bend waveguide of integrated optical gyroscope

Xiang Ji; Hengwei Zhang; Guoguang Yang; Xiaomin Liu; Gang Lei

doi:10.1117/12.782494

28 November 2007 Design and process of low loss bend waveguide of integrated optical gyroscope

Xiang Ji, Hengwei Zhang, Guoguang Yang, Xiaomin Liu, Gang Lei

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 672409 (2007) https://doi.org/10.1117/12.782494
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The most important technology of IIOG is to fabricate low loss waveguide reciprocal structure. This is studied in my article by analyzing the theory and experimental results in practice, introducing an offset at the junction of two waveguides, etching groove at the outer edge of bend waveguide and using waveguide lens effect to decrease bend loss. In experiment the photolithography of thick photoresist and reaction ion etching (RIE) process are studied for waveguide grooves with aspect ratio 1:1. The relevant process of figure's wideninging is discussed in theory and experiment, including mask, photoresist, exposure, development, temperature effect and quadratic effect. The effective minishing techniques are put forward such as spinning coat more times, minishing buds, baking and etching at low temperature and optical stabilization. The RIE process is studied for waveguide grooves too. Grassy prominence, the key reason for bad figure's roughness, is particularly discussed. The effective removaling techniques are also performed in practice, such as photoresist optical stabilization, incidence angle's adjustment and etching gas pressure alternation. It's beneficial to etching low loss waveguide.

Citation Download Citation

Xiang Ji, Hengwei Zhang, Guoguang Yang, Xiaomin Liu, and Gang Lei "Design and process of low loss bend waveguide of integrated optical gyroscope", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672409 (28 November 2007); https://doi.org/10.1117/12.782494

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KEYWORDS

Waveguides

Etching

Photoresist materials

Semiconducting wafers

Polymers

Reactive ion etching

Optical lithography

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