Development of a new optical acceleration sensor

Shuhai Jia; Jia Yang; Weijun Kong; Yanfen Du

doi:10.1117/12.782837

21 November 2007 Development of a new optical acceleration sensor

Shuhai Jia, Jia Yang, Weijun Kong, Yanfen Du

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 672418 (2007) https://doi.org/10.1117/12.782837
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A novel optical acceleration sensor based on optical fiber and MEMS technology is presented in this paper. It can effectively solve the problem of low immunity of inertial sensors and can be used in navigation system towards the Electro Magnetic Interference (EMI) and Electro Magnetic Pulse (EMP). A Fresnel diffractive micro lens is fabricated with a glass substrate. A reflecting membrane is placed behind the diffractive micro lens in parallel and its displacement is determined by acceleration. The sensing principle of the sensor is to calculate acceleration by measuring variousl light intensity at the frontal focal point of the diffractive micro lens. Moreover, the performance of sensor was analyzed. The results of analysis and computer simulation indicated that the design is logical and feasible. The results of proof-of-principle experiments indicate that the principle of this novel sensor is true and it has merits of simple structure and high sensitivity.

Citation Download Citation

Shuhai Jia, Jia Yang, Weijun Kong, and Yanfen Du "Development of a new optical acceleration sensor", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672418 (21 November 2007); https://doi.org/10.1117/12.782837

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KEYWORDS

Sensors

Optical fibers

Microelectromechanical systems

Magnetism

Silicon

Computer simulations

Glasses

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