Comprehensive review of micro/meso-scale machine tools

Q. Y. Wang; F. Z. Fang; X. T. Hu

doi:10.1117/12.782899

21 November 2007 Comprehensive review of micro/meso-scale machine tools

Q. Y. Wang, F. Z. Fang, X. T. Hu

Proceedings Volume 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 67241K (2007) https://doi.org/10.1117/12.782899
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

The development of micro/meso-scale machine tool was motivated by the fabrication of scaled-down workpieces with better quality, higher efficiency and less expense. In contrast with the batch technologies derived from microelectronics, mechanical tool-based process has many virtues such as the ability of creating free-form features, high material removal and less limitation of the working material. With the occurrence of relative novel precision technologies and components, the option of micro/meso-scale machine tools is superior to conventional macro-scale machine tools in machining micro parts and features. In 1990s, the first microlathe and microfactory were developed by MEL in Japan. This research stimulated the further study on micro/meso-scale machine tools over the world. Meanwhile, mechanical tool-based micromachining was also conducted on these test beds demonstrating the feasibility of the concept on micro/meso-scale machine tools. The development of micro/meso-scale machine tools is supported by many technologies in the fields of controls, feedback systems, servo drives, and general machine design and configuration. However, there is still some difficulties in reaching the same machining level of ultra-precision machine tools. These difficulties and corresponding recommendations for future research, such as the configuration and design of micro/mesoscale machine tools, the micromachining mechanism as well as assembly and handling the workpiece etc., are also described.

Citation Download Citation

Q. Y. Wang, F. Z. Fang, and X. T. Hu "Comprehensive review of micro/meso-scale machine tools", Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241K (21 November 2007); https://doi.org/10.1117/12.782899

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