Spiral zone plate imaging for soft x-ray microscopy

Anne Sakdinawat; Yanwei Liu

doi:10.1117/12.769892

19 February 2008 Spiral zone plate imaging for soft x-ray microscopy

Anne Sakdinawat, Yanwei Liu

Proceedings Volume 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics; 68830V (2008) https://doi.org/10.1117/12.769892
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

Phase sensitive x-ray microscopy techniques are important in the study of samples that exhibit phase contrast. One way to detect these phase effects is to optically implement the radial Hilbert transform by using spiral zone plates (SZPs), resulting in the imaging of the amplitude and phase gradient in a sample. This is similar to differential interference contrast imaging in light microscopy. Soft x-ray microscopy using a SZP as a single element objective lens was demonstrated through the imaging of a 1 μm circular aperture at a wavelength of 2.73 nm. A regular zone plate, a charge 1 SZP, and a charge 2 SZP were fabricated on a silicon nitride membrane using electron beam lithography. The negative e-beam resist hydrogen silsesquioxane (HSQ) was used for patterning, and the zone plates were electroplated with nickel. These zone plates were then used as the imaging optic in a soft x-ray microscopy setup.

Citation Download Citation

Anne Sakdinawat and Yanwei Liu "Spiral zone plate imaging for soft x-ray microscopy", Proc. SPIE 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics, 68830V (19 February 2008); https://doi.org/10.1117/12.769892

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