Design of dual-stage actuation system for high precision optical manufacturing

W. Dong; J. Tang; Y. ElDeeb

doi:10.1117/12.776557

18 April 2008 Design of dual-stage actuation system for high precision optical manufacturing

W. Dong, J. Tang, Y. ElDeeb

Proceedings Volume 6928, Active and Passive Smart Structures and Integrated Systems 2008; 692828 (2008) https://doi.org/10.1117/12.776557
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2008, San Diego, California, United States

Abstract

Currently in optical machining systems, the voice coil actuator is implemented for servo control. The main obstacle that hinders the machining accuracy and efficiency is the limited bandwidth of voice coil. To fundamentally solve this issue, we develop a hybrid actuation system that consists of the voice coil that covers the coarse motion and a piezoelectric stack that induces the fine motion. The focus of this present research is the mechatronics synthesis of the actuation system through mechanism design. A series of numerical and experimental studies are carried out to optimally design the dual-stage actuation system that has adequate bandwidth at the system level while maintaining the stroke and alignment of the piezo stack. The performance of the new system is demonstrated via closed-loop system simulation.

Citation Download Citation

W. Dong, J. Tang, and Y. ElDeeb "Design of dual-stage actuation system for high precision optical manufacturing", Proc. SPIE 6928, Active and Passive Smart Structures and Integrated Systems 2008, 692828 (18 April 2008); https://doi.org/10.1117/12.776557

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available