Selete EUV reticle shipping and storage test results

Kazuya Ota; Mitsuaki Amemiya; Takao Taguchi; Osamu Suga

doi:10.1117/12.793025

19 May 2008 Selete EUV reticle shipping and storage test results

Kazuya Ota, Mitsuaki Amemiya, Takao Taguchi, Osamu Suga

Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 70280I (2008) https://doi.org/10.1117/12.793025
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

To protect the reticle during shipping and storage, several reticle pod concepts have been proposed and evaluated in the last 10 years. MIRAI-Selete has been developing EUV reticle handling technology and evaluating EUV reticle pods for two years. In this paper, we report results of shipping tests and storage tests using CNE pods; the CNE pod is designed by Entegris using "Dual Pod Concept" which Canon and Nikon jointly proposed in 2004. The pod consists of an inner pod and an outer pod. The inner pod has two components, a baseplate and a cover; the base plate protects the reticle front surface and the cover protects the back surface from particle contamination in shipping, storage and loading to a reticle chuck in an exposure tool. The outer pod is a RSP-200 slightly modified to contain the inner pod in it. We carried out thirty shipping tests and several storage tests and found the CNE pods had very promising protecting performance during shipping and storage.

Citation Download Citation

Kazuya Ota, Mitsuaki Amemiya, Takao Taguchi, and Osamu Suga "Selete EUV reticle shipping and storage test results", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70280I (19 May 2008); https://doi.org/10.1117/12.793025

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