Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode

Sayaka Idoi; Hayato Fujita; Masayuki Kagawa; Hideki Funamizu; Yukihiro Ishii

doi:10.1117/12.816124

2 February 2009 Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode

Sayaka Idoi, Hayato Fujita, Masayuki Kagawa, Hideki Funamizu, Yukihiro Ishii

Proceedings Volume 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications; 71571P (2009) https://doi.org/10.1117/12.816124
Event: International Conference of Optical Instrument and Technology, 2008, Beijing, China

Abstract

With a newly-developed 16-sample wavelength-shifting algorithm, Fizeau phase-shifting interferometry with a laser diode (LD) suppresses alignment errors in a test plate. This phase-shifting algorithm includes the elimination of phase errors due to changes in laser power by LD currents. The measurement phase errors on a 16-sample phase-extraction algorithm are numerically and experimentally estimated. The surface-profile measurement of a plane-parallel plate is experimentally shown free from systematic errors.

Citation Download Citation

Sayaka Idoi, Hayato Fujita, Masayuki Kagawa, Hideki Funamizu, and Yukihiro Ishii "Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode", Proc. SPIE 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 71571P (2 February 2009); https://doi.org/10.1117/12.816124

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