Paper
2 February 2009 Research on some issues of the method of photoelectric autocollimation for two-dimensional small angle measurement
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Abstract
Four issues of the method of photoelectric autocollimation for two-dimensional small angle measurement such as adjustment of calibration system, elimination of the effect on the measurement result induced by the installing position of the CCD camera relative to the autocollimator, processing methods of experimental data and repeatability of the system are studied in the paper. The calibration system which is composed of a precision motorized stage, a dual-frequency laser interferometer and a photoelectric autocollimator, is regulated to accomplish two separate calibrations around Z-axis and X-axis in the measuring coordinates system which is established by considering horizontal, vertical line of the crosshair and optical axis as X-axis, Z-axis and Y-axis respectively. Experimental results show that the formula method which can reduce the random error and remove the system error effectively with the average error of zero and the standard deviation 0.59". Compared with traditional optical autocollimator, the improvement of the photoelectric autocollimation method can be used to achieve rapid and automatic positional detection and error compensation of CNC rotary shaft.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qimeng Tan, Bixi Yan, and Naiguang Lu "Research on some issues of the method of photoelectric autocollimation for two-dimensional small angle measurement", Proc. SPIE 7160, 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications, 716029 (2 February 2009); https://doi.org/10.1117/12.806960
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KEYWORDS
Calibration

Reticles

Autocollimators

Autocollimation

Charge-coupled devices

Imaging systems

CCD cameras

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