System-level design and analysis of MEMS-based micro-fuze resonator

Rong Guo; Dingjin Huang; Weiwei Guo; Dongchen Shi

doi:10.1117/12.832079

18 May 2009 System-level design and analysis of MEMS-based micro-fuze resonator

Rong Guo, Dingjin Huang, Weiwei Guo, Dongchen Shi

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 72840K (2009) https://doi.org/10.1117/12.832079
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

A system-level behavioral model of micro-fuze resonator is accomplished by utilizing integrated design platform for MEMS CAD. Its validity and veracity are verified using both finite element method and theoretical method. The structural parametric design of micro-fuze resonator is finished and the performance parameters are obtained by systemlevel simulation. Results show that system-level method can be applied for the design of other MEMS devices to greatly improve the efficiency, reduce the period and decrease the cost while maintaining a considerable computing accuracy. And the performances of the designed micro-fuze resonator can meet the requirements for common safety system applications.

Citation Download Citation

Rong Guo, Dingjin Huang, Weiwei Guo, and Dongchen Shi "System-level design and analysis of MEMS-based micro-fuze resonator", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 72840K (18 May 2009); https://doi.org/10.1117/12.832079

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