Study on preparation and electrical properties of Mo-doped vanadium oxide thin films by organic sol-gel

Qianlin Zhang; Zhiming Wu; Yadong Jiang; Kang Zhao

doi:10.1117/12.837588

24 November 2009 Study on preparation and electrical properties of Mo-doped vanadium oxide thin films by organic sol-gel

Qianlin Zhang, Zhiming Wu, Yadong Jiang, Kang Zhao

Author Affiliations +

Proceedings Volume 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology; 751314 (2009) https://doi.org/10.1117/12.837588
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

An organic sol-gel method of preparing Mo-doped vanadium oxide thin films was described. Vanadium oxide powder and molybdenum trioxide powder were dissolved into a mixed solution of benzyl alcohol and isobutyl alcohol to obtain a vanadium solution, which was then spin-coated on glass substrates followed by an anneal at 500°C. Square resistance was measured by the four-point probe, and film thickness was measured by the effects of molar ratio. The effects of doping concentration and film thickness on the electronic properties of vanadium oxide thin film, and film uniformity as well as stability are studied. Results show that the TCR (30°C) of VO₂ films was increased greatly, and the square resistance was reduced by Mo-doped.

Citation Download Citation

Qianlin Zhang, Zhiming Wu, Yadong Jiang, and Kang Zhao "Study on preparation and electrical properties of Mo-doped vanadium oxide thin films by organic sol-gel", Proc. SPIE 7513, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Imaging and Process Technology, 751314 (24 November 2009); https://doi.org/10.1117/12.837588

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