Paper
26 October 2009 Mach-Zehnder electro-optic modulator based on silicon nanophotonic waveguide
Xuejun Xu, Haihua Xu, Zhongchao Fan, Yude Yu, Jinzhong Yu
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Abstract
An electro-optic modulator based on Mach-Zehnder interferometer and embedded PIN diode is demonstrated using silicon nanophotonic waveguide. Measurement results show that the device has high modulation efficiency with a VπL figure of merit of 1.14 V·mm, high modulation depth of 96.27%, and large optical bandwidth from 1500 to 1600 nm. Transmission data rate up to 0.2 Gbps is demonstrated and the rise and fall time are 3.74 ns and 640 ps, respectively.
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Xuejun Xu, Haihua Xu, Zhongchao Fan, Yude Yu, and Jinzhong Yu "Mach-Zehnder electro-optic modulator based on silicon nanophotonic waveguide", Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160C (26 October 2009); https://doi.org/10.1117/12.840007
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KEYWORDS
Waveguides

Modulation

Modulators

Switches

Electrooptic modulators

Silicon

PIN photodiodes

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