Planar silicon SPADs with improved photon detection efficiency

Angelo Gulinatti; Francesco Panzeri; Ivan Rech; Piera Maccagnani; Massimo Ghioni; Sergio D. Cova

doi:10.1117/12.849664

28 April 2010 Planar silicon SPADs with improved photon detection efficiency

Angelo Gulinatti, Francesco Panzeri, Ivan Rech, Piera Maccagnani, Massimo Ghioni, Sergio D. Cova

Proceedings Volume 7681, Advanced Photon Counting Techniques IV; 76810M (2010) https://doi.org/10.1117/12.849664
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

We will report on our advances on the development of a new planar silicon SPAD with high photon detection efficiency (PDE) and good photon timing resolution. We will show that a 10μm thick epitaxial layer allows for the absorption of a significant fraction of the incident photons even at the longer wavelengths, while a suitable electric field profile limits the breakdown voltage value and the timing jitter. Simulations show that the new devices can attain a PDE higher than 30% at a wavelength of 800nm.

Citation Download Citation

Angelo Gulinatti, Francesco Panzeri, Ivan Rech, Piera Maccagnani, Massimo Ghioni, and Sergio D. Cova "Planar silicon SPADs with improved photon detection efficiency", Proc. SPIE 7681, Advanced Photon Counting Techniques IV, 76810M (28 April 2010); https://doi.org/10.1117/12.849664

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