Design of 3D translational motion measurement system based on twin area array CCDs

Kai Wang; Yong Lv; Qingrui Yi

doi:10.1117/12.916885

15 November 2011 Design of 3D translational motion measurement system based on twin area array CCDs

Kai Wang, Yong Lv, Qingrui Yi

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 832147 (2011) https://doi.org/10.1117/12.916885
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The measurement of translational motion is widely applied to many fields such as machine vision, automatic control, etc. A new measurement system of 3-D (three dimensions, X, Y and Z direction) translational motion based on twin area array CCDs is designed. The system consists of stationary part and moving part. The stationary part mainly includes two collimated LED (Light-Emitting Diode) light sources, and the moving part consists of twin area array CCDs (ChargeCoupled Device) which are symmetrically installed on and synchronously moved with the measured object. When the measured object moves, the spots projecting on twin area array CCDs will have corresponding position change, according to the change, the 3-D translational variation of the measured object can be calculated. Due to the measurement principle of translational motion in Y direction works in the same way as in X direction, the experimental system is set up to simulate and measure the 2-D translational motion in X and Z direction. Experimental results show that in comparison with HP5529A dual-frequency laser interferometer system, the measurement accuracy is better than ±1μm. The system has the advantages of high accuracy, non-contact and simple structure.

Citation Download Citation

Kai Wang, Yong Lv, and Qingrui Yi "Design of 3D translational motion measurement system based on twin area array CCDs", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832147 (15 November 2011); https://doi.org/10.1117/12.916885

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available