Paper
23 March 2012 Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources
Daniel Andruczyk, John Sporre, Dan Elg, Tae Cho, David N. Ruzic
Author Affiliations +
Abstract
The Center for Plasma-Material Interactions has developed a detector capable of diagnosing the energetic ion and neutral spectrums emanating from extreme ultraviolet light sources. This tool has been used in the past for high-power output sources, but it is readily evident that actinic inspections tools require the use of debris mitigation analyzers. Using this tool, manufacturers can optimize the use of debris mitigation techniques, as well as analyze the effects brightness increases have on tool lifetime.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel Andruczyk, John Sporre, Dan Elg, Tae Cho, and David N. Ruzic "Energetic ion and neutral energy analyzer for extreme-ultraviolet light sources", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 832237 (23 March 2012); https://doi.org/10.1117/12.916437
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Cited by 1 scholarly publication.
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KEYWORDS
Ions

Sensors

Extreme ultraviolet

Calibration

Plasmas

Light sources

Oscilloscopes

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