The effects of additive gases (Ar, N2, H2, Cl2, O2) on HCl plasma parameters and composition

A. Efremov; A. Yudina; A. Davlyatshina; D. Murin; V. Svetsov

doi:10.1117/12.2017138

8 January 2013 The effects of additive gases (Ar, N₂, H₂, Cl₂, O₂) on HCl plasma parameters and composition

A. Efremov, A. Yudina, A. Davlyatshina, D. Murin, V. Svetsov

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 870003 (2013) https://doi.org/10.1117/12.2017138
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

The direct current (dc) glow discharge plasma parameters and active species kinetics in HCl-X (X = Ar, N₂, H₂, Cl₂, O₂) mixtures were studied using both plasma diagnostics Langmuir probes and modeling. The 0-dimensional self-consistent steady-state model included the simultaneous solution of Boltzmann kinetic equation, the equations of chemical kinetics for neutral and charge particles, plasma conductivity equation and the quasi-neutrality conditions for volume densities of charged particles as well as for their fluxes to the reactor walls. The data on the steady-state electron energy distribution function, electron gas characteristics (mean energy, drift rate and transport coefficients), volume-averaged densities of plasma active species and their fluxed to the reactor walls were obtained as functions of gas mixing ratios and gas pressure at fixed discharge current.

Citation Download Citation

A. Efremov, A. Yudina, A. Davlyatshina, D. Murin, and V. Svetsov "The effects of additive gases (Ar, N₂, H₂, Cl₂, O₂) on HCl plasma parameters and composition", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 870003 (8 January 2013); https://doi.org/10.1117/12.2017138

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available