Effective probe for scanning electron microscope

Yu. V. Larionov; Yu. A. Novikov

doi:10.1117/12.2016917

8 January 2013 Effective probe for scanning electron microscope

Yu. V. Larionov, Yu. A. Novikov

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 87000Y (2013) https://doi.org/10.1117/12.2016917
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

Traditional insight of effective probe of scanning electron microscope (SEM) is considered. A contradiction of this insight with experimental results registered at scanning of test objects with the trapezoidal profile and large slope angles by SEM probe is detected. A new insight of effective probe based on analyzes of the experimental results registered by SEM working in a back scattered electron (BSE) mode is proposed.

Citation Download Citation

Yu. V. Larionov and Yu. A. Novikov "Effective probe for scanning electron microscope", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 87000Y (8 January 2013); https://doi.org/10.1117/12.2016917

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