Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8839, including the Title Page, Copyright information, Table of Contents, Introduction, and Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
"Front Matter: Volume 8839", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 883901 (18 October 2013); https://doi.org/10.1117/12.2045991
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KEYWORDS
Metrology

3D metrology

Inspection

Optical metrology

Current controlled current source

Optical inspection

Interferometers

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