Fourier transform profilometry by using digital dc subtraction

J. Wongjarern; J. Widjaja; W. Sangpech; N. Thongdee; P. Santisoonthornwat; O. Traisak; P. Chuamchaitrakool; P. Meemon

doi:10.1117/12.2054138

2 June 2014 Fourier transform profilometry by using digital dc subtraction

J. Wongjarern, J. Widjaja, W. Sangpech, N. Thongdee, P. Santisoonthornwat, O. Traisak, P. Chuamchaitrakool, P. Meemon

Proceedings Volume 9234, International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics; 923412 (2014) https://doi.org/10.1117/12.2054138
Event: International Conference on Experimental Mechanics 2013 and the Twelfth Asian Conference on Experimental Mechanics, 2013, Bangkok, Thailand

Abstract

A new method for eliminating unwanted background of Fourier transform profilometry (FTP) by using simple dc bias and background eliminations from the deformed grating images is proposed. The proposed method has an advantage over a conventional FTP in that the 3-D object profile can be accurately measured although original fundamental spectra are corrupted by a zeroth-order spectrum. Experimental verifications of the proposed method are presented.

Citation Download Citation

J. Wongjarern, J. Widjaja, W. Sangpech, N. Thongdee, P. Santisoonthornwat, O. Traisak, P. Chuamchaitrakool, and P. Meemon "Fourier transform profilometry by using digital dc subtraction", Proc. SPIE 9234, International Conference on Experimental Mechanics 2013 and Twelfth Asian Conference on Experimental Mechanics, 923412 (2 June 2014); https://doi.org/10.1117/12.2054138

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