Digital calibration method for defects evaluation of large fine optical surfaces

Xiaoyu Chen; Dong Liu; Yongying Yang; Lu Yan; Lu Li; Pin Cao; Shitong Wang; Yibing Shen

doi:10.1117/12.2070598

6 August 2014 Digital calibration method for defects evaluation of large fine optical surfaces

Xiaoyu Chen, Dong Liu, Yongying Yang, Lu Yan, Lu Li, Pin Cao, Shitong Wang, Yibing Shen

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92812R (2014) https://doi.org/10.1117/12.2070598
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

The digital calibration method, which is employed in the Surface Defects Evaluation System (SDES) for the defects evaluation of large fine optical surfaces, is presented in this paper. A criterion board, which comes from special design and careful fabrication, is employed to relate the dimensions of the defects and those of their images. The calibration procedure, including collecting of calibration images, digital image processing and calibration function fitting, is described in detail in this paper. Calibration experiments on scratch width and dig diameter were carried out at three different microscope magnification conditions. Experiment results show that following the proposed digital calibration method, micron-sized defects distributed sparsely on a large-aperture fine optical surface can be evaluated with micron accuracy and high efficiency.

Citation Download Citation

Xiaoyu Chen, Dong Liu, Yongying Yang, Lu Yan, Lu Li, Pin Cao, Shitong Wang, and Yibing Shen "Digital calibration method for defects evaluation of large fine optical surfaces", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92812R (6 August 2014); https://doi.org/10.1117/12.2070598

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