Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence

Tomáš Blejchař; Václav Nevrlý; Michal Vašinek; Michal Dostál; Lukáš Pečínka; Jakub Dlabka; Martin Stachoň; Libor Juha; Petr Bitala; Zdeněk Zelinger; Peter Pira; Jan Wild

doi:10.1117/12.2178437

12 May 2015 Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence

Tomáš Blejchař, Václav Nevrlý, Michal Vašinek, Michal Dostál, Lukáš Pečínka, Jakub Dlabka, Martin Stachoň, Libor Juha, Petr Bitala, Zdeněk Zelinger, Peter Pira, Jan Wild

Author Affiliations +

Proceedings Volume 9511, Damage to VUV, EUV, and X-ray Optics V; 95110K (2015) https://doi.org/10.1117/12.2178437
Event: SPIE Optics + Optoelectronics, 2015, Prague, Czech Republic

Abstract

This paper deals with prediction of extreme ultraviolet (XUV) laser ablation of lithium fluoride at nanosecond timescales. Material properties of lithium fluoride were determined based on bibliographic survey. These data are necessary for theoretical estimation of surface removal rate in relevance to XUV laser desorption/ablation process. Parameters of XUV radiation pulses generated by the Prague capillary-discharge laser (CDL) desktop system were assumed in this context. Prediction of ablation curve and threshold laser fluence for lithium fluoride was performed employing XUV-ABLATOR code. Quasi-random sampling approach was used for evaluating its predictive capabilities in the means of variance and stability of model outputs in expected range of uncertainties. These results were compared to experimental data observed previously.

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Tomáš Blejchař, Václav Nevrlý, Michal Vašinek, Michal Dostál, Lukáš Pečínka, Jakub Dlabka, Martin Stachoň, Libor Juha, Petr Bitala, Zdeněk Zelinger, Peter Pira, and Jan Wild "Material properties of lithium fluoride for predicting XUV laser ablation rate and threshold fluence", Proc. SPIE 9511, Damage to VUV, EUV, and X-ray Optics V, 95110K (12 May 2015); https://doi.org/10.1117/12.2178437

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KEYWORDS

Laser ablation

Laser induced fluorescence

Extreme ultraviolet

Lithium

Data modeling

Laser damage threshold

Signal attenuation

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