Study of a sensor based on the series of micro-rings with dual coupling points

Xin Li; Shiliang Guo; Ruiqi Piao; Ming Yang

doi:10.1117/12.2179267

13 April 2015 Study of a sensor based on the series of micro-rings with dual coupling points

Xin Li, Shiliang Guo, Ruiqi Piao, Ming Yang

Proceedings Volume 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II; 95220P (2015) https://doi.org/10.1117/12.2179267
Event: Selected Proceedings of the Photoelectronic Technology Committee Conferences held August-October 2014, 2014, China, China

Abstract

A novel type of humidity sensor based on the series of micro-rings with the same radius is proposed, and the humidity is measured by detecting the spectrum drift. Experimental results show the sensitivity can achieve about 16pm/10%RH and the sensing range of the humidity sensor is 10~60%RH. The proposed structure will provide an effective way for integrated humidity sensors with simple structure, high sensitivity and low cost.

Citation Download Citation

Xin Li, Shiliang Guo, Ruiqi Piao, and Ming Yang "Study of a sensor based on the series of micro-rings with dual coupling points", Proc. SPIE 9522, Selected Papers from Conferences of the Photoelectronic Technology Committee of the Chinese Society of Astronautics 2014, Part II, 95220P (13 April 2015); https://doi.org/10.1117/12.2179267

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