Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method

Fugui Yang; Quan Cai; Peng Liu; Weifan Sheng; Xiaowei Zhang; Ming Li

doi:10.1117/12.2244271

25 October 2016 Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method

Fugui Yang, Quan Cai, Peng Liu, Weifan Sheng, Xiaowei Zhang, Ming Li

Author Affiliations +

Proceedings Volume 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics; 968706 (2016) https://doi.org/10.1117/12.2244271
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

The quality of X-ray optics on beamline is a key factor that limits the performance of the beam line to play. For X-ray mirror surface characterization with high accuracy, long trace profiler and NOM for flat or slight curved mirror have been developed. However, these two kind of instruments cannot measure the highly curved mirror since requirement of high precision and that of large range contradict each other. In this paper, we proposed a novel wavefront-coding-based surface slope metrology technique. Four-dimension information of the optics under test, including x-y position and sagittal/tangential angle, is provided. Due to the focused beam used and the high speed DMD (Digital Mirror Device), high spatial resolution of the measurement is obtained. In experiment, we demonstrated this technique by measuring bend-based high energy monochromator developed in BSRF.

Citation Download Citation

Fugui Yang, Quan Cai, Peng Liu, Weifan Sheng, Xiaowei Zhang, and Ming Li "Two dimensional surface slope metrology with enhanced spatial resolution based on wavefront coding method", Proc. SPIE 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics, 968706 (25 October 2016); https://doi.org/10.1117/12.2244271

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