Si-doped indium-gallium-zinc-oxide (IGZO) film properties measurements

Roy Koret; Harold Dekkers; Quentin Smets; Romain Delhougnea; Gouri Sankar Kar; Joey Hung; Vanessa Zhang; Wei Ti Lee; Amiad Conley

doi:10.1117/12.2613750

13 June 2022 Si-doped indium-gallium-zinc-oxide (IGZO) film properties measurements

Roy Koret, Harold Dekkers, Quentin Smets, Romain Delhougnea, Gouri Sankar Kar, Joey Hung, Vanessa Zhang, Wei Ti Lee, Amiad Conley

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Proceedings Volume PC12053, Metrology, Inspection, and Process Control XXXVI; PC1205313 (2022) https://doi.org/10.1117/12.2613750
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

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Roy Koret, Harold Dekkers, Quentin Smets, Romain Delhougnea, Gouri Sankar Kar, Joey Hung, Vanessa Zhang, Wei Ti Lee, and Amiad Conley "Si-doped indium-gallium-zinc-oxide (IGZO) film properties measurements", Proc. SPIE PC12053, Metrology, Inspection, and Process Control XXXVI, PC1205313 (13 June 2022); https://doi.org/10.1117/12.2613750

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