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3 October 2022 Three-dimensional broadband metamaterial absorbers for IR gas molecules sensing (Conference Presentation)
Takuo Tanaka
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Proceedings Volume PC12195, Metamaterials, Metadevices, and Metasystems 2022; PC121951H (2022) https://doi.org/10.1117/12.2632928
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States
Abstract
Experimental and theoretical studies of broadband metamaterial absorbers and their application for infrared spectroscopic gas molecules sensing are presented. We design a metamaterial absorber consisting of an array of conical helix gold structures and fabricated it by the use of electron beam lithography and dry etching techniques. Broadband absorptive properties of the proposed metamaterial absorber was confirmed both numerically and experimentally. In order to realize higher sensitivity on IR spectroscopy, three-dimensional vertical-oriented metal-insulator-metal (v-MIM) metamaterial absorber is also proposed. By using v-MIM metamaterial absorber, we successfully detected 20 ppm concentration of carbon dioxide and butane molecules with negligible background noise.
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Takuo Tanaka "Three-dimensional broadband metamaterial absorbers for IR gas molecules sensing (Conference Presentation)", Proc. SPIE PC12195, Metamaterials, Metadevices, and Metasystems 2022, PC121951H (3 October 2022); https://doi.org/10.1117/12.2632928
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KEYWORDS
Metamaterials
Molecules
Infrared spectroscopy
Infrared sensors
Molecular spectroscopy
Infrared detectors
Infrared radiation
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