Production of AR/VR waveguides with displacement Talbot lithography

Harun H. Solak

doi:10.1117/12.2643318

16 November 2022 Production of AR/VR waveguides with displacement Talbot lithography

Harun H. Solak

Proceedings Volume PC12293, Photomask Technology 2022; PC122930C (2022) https://doi.org/10.1117/12.2643318
Event: SPIE Photomask Technology + EUV Lithography, 2022, Monterey, California, United States

Abstract

Many developers of AR/VR devices use diffraction gratings on their waveguides to guide the transmission of an image from the projector to the viewer's eye. Production of such diffractive structures in high volumes presents many challenges in terms of resolution, accuracy, fidelity, yield and cost. Displacement Talbot Lithography technology brings the proven advantages of photolithography to the AR/VR field enabling high quality waveguide production at low cost.

Conference Presentation

Citation Download Citation

Harun H. Solak "Production of AR/VR waveguides with displacement Talbot lithography", Proc. SPIE PC12293, Photomask Technology 2022, PC122930C (16 November 2022); https://doi.org/10.1117/12.2643318

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