Adjusting VCSEL wavelength and index by etching and regrowth

Darwin K. Serkland; Michael G. Wood; Kent M. Geib; Alejandro J. Grine; Gregory M. Peake; Ping-Show Wong; Victor J. Patel

doi:10.1117/12.2651018

17 March 2023 Adjusting VCSEL wavelength and index by etching and regrowth

Darwin K. Serkland, Michael G. Wood, Kent M. Geib, Alejandro J. Grine, Gregory M. Peake, Ping-Show Wong, Victor J. Patel

Author Affiliations +

Proceedings Volume PC12439, Vertical-Cavity Surface-Emitting Lasers XXVII; PC1243905 (2023) https://doi.org/10.1117/12.2651018
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We report on the use of etching and regrowth to shift the longitudinal resonance wavelength of adjacent VCSELs by -4nm from 980nm. The etched VCSEL exhibited less than 5% change in threshold (from 0.36mA) and slope efficiency relative to neighboring un-etched VCSELs. This etch and regrowth technique can be applied to produce wavelength-division multiplexed (WDM) VCSEL arrays with close spacing (<100microns). We will also discuss applications to 2-dimensional index engineering of novel VCSEL devices, since wavelength shifting is equivalent to effective index tuning.

Conference Presentation

Citation Download Citation

Darwin K. Serkland, Michael G. Wood, Kent M. Geib, Alejandro J. Grine, Gregory M. Peake, Ping-Show Wong, and Victor J. Patel "Adjusting VCSEL wavelength and index by etching and regrowth", Proc. SPIE PC12439, Vertical-Cavity Surface-Emitting Lasers XXVII, PC1243905 (17 March 2023); https://doi.org/10.1117/12.2651018

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