Opportunities of polarization-resolved EUV scatterometry on photomasks

Victor Soltwisch; Till Biskup

doi:10.1117/12.2691986

22 November 2023 Opportunities of polarization-resolved EUV scatterometry on photomasks

Victor Soltwisch, Till Biskup

Proceedings Volume PC12751, Photomask Technology 2023; PC127510O (2023) https://doi.org/10.1117/12.2691986
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

This conference presentation was prepared for Photomask Technology 2023.

Conference Presentation

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Victor Soltwisch and Till Biskup "Opportunities of polarization-resolved EUV scatterometry on photomasks", Proc. SPIE PC12751, Photomask Technology 2023, PC127510O (22 November 2023); https://doi.org/10.1117/12.2691986

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