Presentation
13 March 2024 An inexpensive open-source solution for dual rotating variable angle reflective ellipsometer (VARE)
Enkui Lian, John de Mello
Author Affiliations +
Abstract
We describe an inexpensive, open-source rotating polariser, rotating analyser variable angle reflective ellipsometer (VARE), suitable for measuring the generalised ellipsometric angles of anisotropic materials. With a build cost of $800 and substantial scope for customisation, the instrument offers functionality typically associated with far costlier commercial instruments. Phase alignment of the rotating polarisers is achieved by a phase-locked loop, while the ellipsometric angles are determined by Fourier analysis of the reflected signal, using an integrated microcontroller-based lock-in amplifier. The performance of the instrument is compared against a high-end commercial instrument.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Enkui Lian and John de Mello "An inexpensive open-source solution for dual rotating variable angle reflective ellipsometer (VARE)", Proc. SPIE PC12832, Optics and Biophotonics in Low-Resource Settings X, PC1283201 (13 March 2024); https://doi.org/10.1117/12.2692578
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KEYWORDS
Equipment

Ellipsometry

Polarizers

Near infrared

Optical properties

Reflection

Surface properties

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