Quick and simple calibration for phase response and optical flatness in phase-only SLMs

Minchol Lee; Donghoon Koo; Jeongmin Kim

doi:10.1117/12.3000261

13 March 2024 Quick and simple calibration for phase response and optical flatness in phase-only SLMs

Minchol Lee, Donghoon Koo, Jeongmin Kim

Proceedings Volume PC12851, Adaptive Optics and Wavefront Control for Biological Systems X; PC128510K (2024) https://doi.org/10.1117/12.3000261
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

Phase-only spatial light modulators (SLMs) are extensively utilized for controlling the phase of light in diverse applications. However, liquid-crystal-on-silicon (LCOS) SLMs exhibit undesired spatial variations in both phase response and optical flatness across the SLM panel, which necessitates calibration for achieving accurate phase control. Here, we propose a rapid and straightforward calibration approach to address these non-uniformities at the single-pixel level. Our method leverages Twyman-Green interferometry without relying on a piezoelectric transducer, significantly reducing the measurement time to approximately 4.5 seconds by collecting only 18 interferograms of SLM patterns with constant gray levels. This remarkable speed ensures minimal vulnerability to environmental disturbances during interferometry. We provide a comprehensive description of the calibration procedure, evaluate the performance of the calibrated local pixel response, and validate the flatness calibration using SLM-based phase shift interferometry.

Conference Presentation

Citation Download Citation

Minchol Lee, Donghoon Koo, and Jeongmin Kim "Quick and simple calibration for phase response and optical flatness in phase-only SLMs", Proc. SPIE PC12851, Adaptive Optics and Wavefront Control for Biological Systems X, PC128510K (13 March 2024); https://doi.org/10.1117/12.3000261

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KEYWORDS

Spatial light modulators

Calibration

Interferograms

Phase shift keying

Optics manufacturing

Phase modulation

Optical limiting

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