Nanoscale parallel 3D printing based on digital holography

Wen Qi Ouyang; Shih-Chi Chen

doi:10.1117/12.3002688

13 March 2024 Nanoscale parallel 3D printing based on digital holography

Wen Qi Ouyang, Shih-Chi Chen

Proceedings Volume PC12876, Laser 3D Manufacturing XI; PC1287607 (2024) https://doi.org/10.1117/12.3002688
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

We present a multi-focus digital holography-based two-photon lithography (TPL) platform for high-resolution, large-scale 3D nanofabrication. Specifically, up to 2000 individually programmable laser foci are generated and controlled via digital holography and powered by a 1 kHz regenerative femtosecond laser amplifier, which effectively increases the fabrication rate to 2,000,000 voxels/sec with a lateral resolution of 90 nm. We have designed and fabricated a variety of complex 3D structures, e.g., mechanical metastructures, and experimentally verified their properties and mechanical performance. These results show our new platform is a powerful tool for applications in photonics, nanotechnology, and biotechnology.

Conference Presentation

Citation Download Citation

Wen Qi Ouyang and Shih-Chi Chen "Nanoscale parallel 3D printing based on digital holography", Proc. SPIE PC12876, Laser 3D Manufacturing XI, PC1287607 (13 March 2024); https://doi.org/10.1117/12.3002688

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