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SUBSCRIPTIONS & PRICING
GENERAL INFORMATION
Reference Data for the EUV Spectral Region
from:
EUV Lithography
Editor(s):
Vivek Bakshi
Published: 11 December 2008
Chapter DOI: http://dx.doi.org/10.1117/3.769214.apa
Chapter Page Count: 22
pages
Table of Contents
Chapter Contents
- A.1 Introduction
- Table A.1 Optical constants and absorption data for extreme ultraviolet wavelengths
- Table A.2 Physical constants
- Table A.3 Electron binding energies in electron volts for the elements in their natural forms
- Table A.4 Photon energies in electron volts of principal K- and L-shell emission lines
- References
Excerpt
A.1 Introduction
Basic equations and data for the interaction of EUV radiation with materials is presented. The complex refractive index and penetration of EUV radiation into materials is presented in terms of the real and imaginary parts of the atomic scattering factors for various atoms of common interest. These scattering factors are presented graphically as a function of photon energy, with sample tabulated values. Full access for all elements, and sample calculation routines for compound materials, are referred to the CXRO website. Basic physical constants from the NIST website are also given. Tabulations of electron binding energies and characteristically emitted photon energies are presented in tables for all natural elements.
©2009 Society of Photo-Optical Instrumentation Engineers
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