Jump to Content
Your Recent History
View Cart
GENERAL INFORMATION
Logged Out Log In
Design, fabrication, and evaluation of vacuum testing of a novel electromagnetic microactuator
J. Micro/Nanolith. MEMS MOEMS 10, 043001 (Oct 04, 2011); http://dx.doi.org/10.1117/1.3641412
Alerts
Alert Me When Cited
Alert Me When Corrected
Tools
Download Citation
Add to MyScitation
Blog This Article
Print-Friendly
Research Toolkit
Share
Email Abstract
Connotea
CiteULike
del.icio.us
BibSonomy
Tweet this Article
Add to FacebookA novel electromagnetic microactuator with lateral magneto-static force was developed in this study. A simple fabrication process with low cost was proposed to realize the device for optical applications. The actuation performances in different vacuum degrees were also examined for the verification of following packaging efficacy. The present method assembled a tiny permanent magnet on a supporting beam to couple with a fixed solenoid coil for driving a suspension plate in vibration by applying an alternating current. Actuation modes with torsion and bending beams can be designed to satisfy the different optical applications, such as barcode reader, optical switch, and laser display. The typical experiment results for higher and lower actuation frequencies under the first resonant mode are 4.43 kHz and 179 Hz, respectively. In an ambient environment, the corresponding mechanical tilt angle to the case of higher frequency is 11.2 deg at the supply voltage ±2.5 V. The maximum tilt angle at the vacuum degree of 76 mTorr is increased by 31% compared with that of 760 Torr. The thermal effect induced by the coil is minimized to actuation performance, even at high vacuum environments. Thus, based on the results of this study, high reliability with high vacuum packaging can be expected.
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)
History
Received Apr 05, 2011
Accepted Aug 30, 2011
Revised Aug 10, 2011
Published online Oct 04, 2011
Accepted Aug 30, 2011
Revised Aug 10, 2011
Published online Oct 04, 2011
Digital Object Identifier
Citation
Tenghsien Lai and Chingfu Tsou, "Design, fabrication, and evaluation of vacuum testing of a novel electromagnetic microactuator",
J. Micro/Nanolith. MEMS MOEMS 10, 043001 (Oct 04, 2011); http://dx.doi.org/10.1117/1.3641412
DOWNLOAD ARTICLE
LOG IN or SELECT A PURCHASE OPTION:
- Buy PDF (US$25)
- Rent Article ()
RELATED CONTENT
More Like This Article
For access to fully linked references, you need to log in.
SPIE Digital Library
This Publication
Google Scholar
PubMed