Fabrication of monolithic polymer nanofluidic channels via near-field electrospun nanofibers as sacrificial templates

Fuh, Yiin-Kuen; Hsu, Hung-Shuo

doi:doi:10.1117/1.3644990

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Journal of Micro/Nanolithography, MEMS, and MOEMS / Volume 10 / Issue 4 / Articles

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Fabrication of monolithic polymer nanofluidic channels via near-field electrospun nanofibers as sacrificial templates

J. Micro/Nanolith. MEMS MOEMS 10, 043004 (Oct 21, 2011); http://dx.doi.org/10.1117/1.3644990

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Abstract

References (30)

Yiin-Kuen Fuh and Hung-Shuo Hsu

National Central University, Department of Mechanical Engineering, Taoyuan, 32001 Taiwan

This paper reports a facile and maskless method for fabricating nanofluidic channel arrays using near-field electrospinning (NFES) templates with prescribed patterns and the polydimethylsiloxane (PDMS) molding technique. Nanochannels were fabricated monolithically through three main steps: 1) direct-writing nanofiber arrays onto a silicon substrate using NFES, 2) PDMS molding of the prescribed nanofibers patterns, and 3) plasma treating PDMS substrate to promote the adhesion and bonding process. The nanochannels fabricated in this study had channel widths ranging from 500 to 1300 nm and depths of 70 to 500 nm, and were patterned in a fashion similar to the wire bonding process routinely used in the semiconductor industry. The nanochannel dimensions were predominantly dictated by electrospun nanofibers, showing that NFES is capable of depositing nanofibers with a diameter down to ∼50 nm. Results show that reliable and repeatable nanofluidic channel arrays were speedily fabricated at a very low cost, while nanofluidic patterns and dimensions are predominantly controlled by NFES in a direct-write, addressable manner.

History

Received Jun 22, 2011
Accepted Sep 12, 2011
Revised Aug 30, 2011
Published online Oct 21, 2011

Digital Object Identifier

http://dx.doi.org/10.1117/1.3644990

Citation

Yiin-Kuen Fuh and Hung-Shuo Hsu, "Fabrication of monolithic polymer nanofluidic channels via near-field electrospun nanofibers as sacrificial templates", J. Micro/Nanolith. MEMS MOEMS 10, 043004 (Oct 21, 2011); http://dx.doi.org/10.1117/1.3644990