Lossless circuit layout image compression algorithm for maskless direct write lithography systems

Yang, Jeehong; Savari, Serap A.

doi:doi:10.1117/1.3644620

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Journal of Micro/Nanolithography, MEMS, and MOEMS / Volume 10 / Issue 4 / Articles

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Lossless circuit layout image compression algorithm for maskless direct write lithography systems

J. Micro/Nanolith. MEMS MOEMS 10, 043007 (Nov 08, 2011); http://dx.doi.org/10.1117/1.3644620

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Abstract

References (19)

Citing Articles (2)

Jeehong Yang

University of Michigan, Electrical Engineering and Computer Science Department, Ann Arbor, Michigan 48109

Serap A. Savari

Texas A&M University, Electrical and Computer Engineering Department, College Station, Texas 77843

The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process.

History

Received Aug 17, 2010
Accepted Sep 09, 2011
Revised Jul 19, 2011
Published online Nov 08, 2011

Digital Object Identifier

http://dx.doi.org/10.1117/1.3644620

Citation

Jeehong Yang and Serap A. Savari, "Lossless circuit layout image compression algorithm for maskless direct write lithography systems", J. Micro/Nanolith. MEMS MOEMS 10, 043007 (Nov 08, 2011); http://dx.doi.org/10.1117/1.3644620