Wavefront-based pixel inversion algorithm for generation of subresolution assist features

Yu, Jue-Chin; Yu, Peichen; Chao, Hsueh-Yung

doi:doi:10.1117/1.3663249

GENERAL INFORMATION

You are not logged in Logged Out Log In

Journal of Micro/Nanolithography, MEMS, and MOEMS / Volume 10 / Issue 4 / Articles

Previous Article | Next Article

Wavefront-based pixel inversion algorithm for generation of subresolution assist features

J. Micro/Nanolith. MEMS MOEMS 10, 043014 (Dec 01, 2011); http://dx.doi.org/10.1117/1.3663249

Alerts
- Alert Me When Cited
- Alert Me When Corrected
Tools
Share
- Email Abstract
- Connotea
- CiteULike
- del.icio.us
- BibSonomy
- Tweet this Article
- Add to Facebook

Abstract

References (33)

Citing Articles (1)

Jue-Chin Yu and Peichen Yu

National Chiao Tung University, Department of Photonics and Institute of Electro-Optical Engineering, 1001 Da-hsueh Road, Hsinchu 30050, Taiwan

Hsueh-Yung Chao

ANSYS, Inc., 225 West Station Square Drive, Suite 200, Pittsburgh, Pennsylvania 15219

The generation of subresolution assist features (SRAFs) using inverse-lithography techniques demands extensive computational resources which limits its deployment in advanced CMOS nodes. In this paper, we propose a wavefront-based pixel inversion algorithm to quickly obtain inverse masks with a high aerial image quality. Further assisted by a flexible pattern simplification technique, we present effective SRAF generation and placement based on the calculated inverse mask. The proposed approach can be easily inserted prior to a conventional mask correction flow for subsequent concurrent optimizations of both drawn patterns and SRAFs. The innovative pixel inversion and pattern simplification techniques allow quality mask corrections as produced by inverse lithography while maintaining the convenience of standardized/validated process flows currently used in the industry.

History

Received Mar 29, 2011
Accepted Nov 02, 2011
Revised Oct 04, 2011
Published online Dec 01, 2011

Digital Object Identifier

http://dx.doi.org/10.1117/1.3663249

Citation

Jue-Chin Yu, Peichen Yu and Hsueh-Yung Chao, "Wavefront-based pixel inversion algorithm for generation of subresolution assist features", J. Micro/Nanolith. MEMS MOEMS 10, 043014 (Dec 01, 2011); http://dx.doi.org/10.1117/1.3663249